Application of Cad Systems to Accounting for Mechanical Stresses in the Development of Uncooled Thermal Detectors of the Bolometric Type

A comparative analysis of the characteristics main types bolometers is indicated in article. The constructive solution an uncooled thermal detector bolometric type, formed using technology microelectromechanical systems, studied. By means computer simulation modern computer-aided design systems microelectronics, a static mechanical was performed to assess effect stresses arising structural materials during their formation on magnitude deformation. It has been established that ensure normal functioning microbolometer (to reduce maximum deviation value film from nominal value), it necessary internal NiCr film. For Si 3 N 4 films, contrary, this should be increased.